Plasma properties measurements of parallel-plane electrodes in argon by coupling OES and PLIF

Fangyi Wang; Shaohua Zhang; Xilong Yu

doi:10.1117/12.2590211

18 March 2021 Plasma properties measurements of parallel-plane electrodes in argon by coupling OES and PLIF

Fangyi Wang, Shaohua Zhang, Xilong Yu

Proceedings Volume 11780, Global Intelligent Industry Conference 2020; 1178016 (2021) https://doi.org/10.1117/12.2590211
Event: Global Intelligent Industry Conference 2020, 2020, Guangzhou, China

Abstract

Plasma properties are diagnosed in parallel-plane electrodes under 1-15 kPa within input power of 0-25 W by coupling Optical Emission Spectroscopy (OES) and Planar Laser-induced fluorescence (PLIF). Electron excitation temperature (T_e), electron density (N_e) are obtained based on the intensities and broadenings of atomic and ionic spectral lines of argon. The spatial resolution of T_e and N_e are measured by a high-precision setup based on fiber. At the gas pressure of 1 kPa, T_e reaches maximum of 8.745×10³ K while the peak of N_e appears in 15 kPa, is 3.237×10¹⁶ cm^-3 . Besides, spatial distribution of 1s₅metastable atoms (Ar^M) with transition scheme 4s( ²P⁰_3/2)₂ -4p ( P (²P⁰ _1/2)₁-4s(²P⁰ _3/2)₁ are revealed by PLIF, as a complementary of plasma properties. The number density of Ar^M also shows a larger number density in 15 kPa. Combined with OES, T_e, N_e and number of Ar^M are higher around the surface of anode within discharge area. The current experimental results are demonstration of optimal plasma state under different external parameters and validation of relevant discharge models

Citation Download Citation

Fangyi Wang, Shaohua Zhang, and Xilong Yu "Plasma properties measurements of parallel-plane electrodes in argon by coupling OES and PLIF", Proc. SPIE 11780, Global Intelligent Industry Conference 2020, 1178016 (18 March 2021); https://doi.org/10.1117/12.2590211

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