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20 June 2021 Applicability simulations of inverted plasmonic lenses
Tim Käseberg, Thomas Siefke, Jana Grundmann, Stefanie Kroker, Bernd Bodermann
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Proceedings Volume 11783, Modeling Aspects in Optical Metrology VIII; 117830E (2021) https://doi.org/10.1117/12.2591098
Event: SPIE Optical Metrology, 2021, Online Only
Abstract
To precisely characterize nanostructures while keeping the advantages of optical measurements, modern methods are still being refined. Plasmonic lenses, which are designable with less computational effort than dielectric metalenses, are promising. Simulations showed that sub-wavelength sized focal spots in arbitrary distances are achievable. We describe our simulations of the lens-sample interaction with plasmonic lenses with working distances up to 1 mm combined with single and periodic nanostructures using finite element method. Scanning the focal spot over the sample, we examine transmission and reflection in the far field, the field-structure interaction in the near field, and the applicability in Mueller ellipsometry.
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Tim Käseberg, Thomas Siefke, Jana Grundmann, Stefanie Kroker, and Bernd Bodermann "Applicability simulations of inverted plasmonic lenses", Proc. SPIE 11783, Modeling Aspects in Optical Metrology VIII, 117830E (20 June 2021); https://doi.org/10.1117/12.2591098
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KEYWORDS
Lenses
Plasmonics
Near field scanning optical microscopy
Optical microscopy
Dielectrics
Diffraction
Nanostructures
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