Experiments and simulations of femtosecond laser micromachined features for correcting thin silicon mirror segments of X-ray telescopes

Heng E. Zuo; Brandon D. Chalifoux; Ralf K. Heilmann; Mark L. Schattenburg

doi:10.1117/12.2595431

5 August 2021 Experiments and simulations of femtosecond laser micromachined features for correcting thin silicon mirror segments of X-ray telescopes

Heng E. Zuo, Brandon D. Chalifoux, Ralf K. Heilmann, Mark L. Schattenburg

Author Affiliations +

Proceedings Volume 11822, Optics for EUV, X-Ray, and Gamma-Ray Astronomy X; 118220V (2021) https://doi.org/10.1117/12.2595431
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Abstract

The fabrication of a large number of high-resolution, grazing-incidence, thin-shell mirror segments for space X-ray telescopes is still challenging. We have developed an X-ray mirror correction method, using a femtosecond laser to remove selective regions of a stressed film on the mirror back surface to modify the stress states. Our recent experiments have created both isotropic and anisotropic stress states on thin flat silicon mirrors with thermal oxide films using a green light femtosecond laser. An Abaqus finite element model has achieved good comparison between simulations and experiments in the bending of thin-shell mirrors under different stressed film patterns.

Conference Presentation

Citation Download Citation

Heng E. Zuo, Brandon D. Chalifoux, Ralf K. Heilmann, and Mark L. Schattenburg "Experiments and simulations of femtosecond laser micromachined features for correcting thin silicon mirror segments of X-ray telescopes", Proc. SPIE 11822, Optics for EUV, X-Ray, and Gamma-Ray Astronomy X, 118220V (5 August 2021); https://doi.org/10.1117/12.2595431

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