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During the production and processing of the cavity surface of a semiconductor laser, micro-defects such as scratches, cracks and grooves will inevitably be caused to the cavity surface. The existence of micro-defects on the cavity surface will affect the distribution of the laser inside the cavity surface, causing the cavity surface temperature to rise sharply. When the temperature reaches the melting point of the cavity surface material, it will cause thermal fusion damage to the cavity surface. When the temperature reaches the vaporization point, microdefects on the surface of the cavity will cause further damage and expansion.In the summary and analysis of the interaction mechanism between laser and optical materials, the temperature distribution and damage expansion model of GaAs cavity surface were established based on the theory of heat conduction and deformation geometry.By comparing and analyzing the damage expansion induced by tapered microdefects with different depths and base radius, it is found that the depth of damage expansion is inversely proportional to the depth of the initial defect and directly proportional to the width of the initial defect.And it was found that the larger the surface area of the initial microdefects, the greater the damage expansion speed and depth.At the same time, by comparing the change rule of the dot center temperature with the damage expansion speed, it is found that the damage expansion speed caused by the microdefect is consistent with the rising speed of the point center temperature.
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