Hertz-linewidth hybrid integrated laser based on high-Q Si3N4 microring reflectors

Jiachen Li; Sigang Yang; Hongwei Chen; Minghua Chen

doi:10.1117/12.2601127

9 October 2021 Hertz-linewidth hybrid integrated laser based on high-Q Si₃N₄ microring reflectors

Jiachen Li, Sigang Yang, Hongwei Chen, Minghua Chen

Proceedings Volume 11891, Semiconductor Lasers and Applications XI; 118910V (2021) https://doi.org/10.1117/12.2601127
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Conference Poster

Abstract

We report a compact and robust laser linewidth reduction solution for commercially available distributed feedback (DFB) semiconductor lasers by butt-coupling a high-Q Si₃N₄ microring reflector to a DFB semiconductor laser. We fabricate the microring reflector on the 80nm-thick high-aspect-ratio Si3N4 waveguide platform. The 3-dB bandwidth and the free spectral range of the fabricated Si₃N₄ microring reflector are measured to be 50 MHz and 14.13 GHz, respectively, corresponding to a Q factor of over 3.8 million and finesse of 283. In the experiment, the intrinsic linewidth of the hybrid integrated laser is reduced to an ultra-low level of 2.86 Hz. The proposed hertz-linewidth hybrid integrated laser has great potentials in high-speed coherent optical communications systems and high-resolution optical metrology.

Citation Download Citation

Jiachen Li, Sigang Yang, Hongwei Chen, and Minghua Chen "Hertz-linewidth hybrid integrated laser based on high-Q Si₃N₄ microring reflectors", Proc. SPIE 11891, Semiconductor Lasers and Applications XI, 118910V (9 October 2021); https://doi.org/10.1117/12.2601127

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