Optically smooth and optically rough surfaces in 3D profilometry

Pavel Pavlicek

doi:10.1117/12.2616263

27 October 2021 Optically smooth and optically rough surfaces in 3D profilometry

Pavel Pavlicek

Proceedings Volume 11927, Optical Technology and Measurement for Industrial Applications Conference 2021; 119270G (2021) https://doi.org/10.1117/12.2616263
Event: SPIE Technologies and Applications of Structured Light, 2021, Online, Japan

Abstract

The task of optical 3D profilometry is to measure the value of spatial coordinate of one or more surface points of an object. The value of measured coordinate is obtained from one or more intensity values that are recorded by a detector. The way in which the resulting intensity is generated depends on whether the surface is optically smooth or rough. The property of a surface to be optically smooth or rough depends on the mechanical properties of the surface and on the parameters of the optical system. We present a detailed analysis of the conditions on which a surface can be classified as optically smooth or optically rough. It is also discussed how the optically smooth surface and the resolved mode are related.

Citation Download Citation

Pavel Pavlicek "Optically smooth and optically rough surfaces in 3D profilometry", Proc. SPIE 11927, Optical Technology and Measurement for Industrial Applications Conference 2021, 119270G (27 October 2021); https://doi.org/10.1117/12.2616263

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