The path towards mass manufacturing of optical waveguide combiners via large-area nanoimprinting

Matthias Jotz; Frederik Bachhuber; Stefan Steiner; Brian Bilenberg; Tobias Hedegaard Bro; Jan Matthijs ter Meulen; Erhan Ercan; Janne Simonen; Murat Deveci

doi:10.1117/12.2614310

7 March 2022 The path towards mass manufacturing of optical waveguide combiners via large-area nanoimprinting

Matthias Jotz, Frederik Bachhuber, Stefan Steiner, Brian Bilenberg, Tobias Hedegaard Bro, Jan Matthijs ter Meulen, Erhan Ercan, Janne Simonen, Murat Deveci

Author Affiliations +

Proceedings Volume 11931, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) III; 1193109 (2022) https://doi.org/10.1117/12.2614310
Event: SPIE AR VR MR, 2022, San Francisco, California, United States

Conference Poster

Abstract

A promising path towards consumer electronics-ready manufacturing of optical waveguide combiners is via large-area nanoimprinted surface relief gratings on high index glass substrates. Presently, this is realized through equipment and substrates based on wafer format (up to 12-inch). In this work, we present a way to produce waveguides with surface relief gratings utilizing the entire value chain from design to mastering to replication on panel-level nanoimprint equipment using rectangular high refractive index glass substrates and high refractive index resins. This is demonstrated on a greater than Gen 3 panel size (550 mm x 650 mm). The fabricated waveguides are optically tested to validate the design and the value chain. We demonstrate that the quality of the large area imprints is similar to present wafer-level imprints. Thus, we introduce a new approach towards high volume and low-cost manufacturing of waveguides based on surface relief gratings.

Conference Presentation

Citation Download Citation

Matthias Jotz, Frederik Bachhuber, Stefan Steiner, Brian Bilenberg, Tobias Hedegaard Bro, Jan Matthijs ter Meulen, Erhan Ercan, Janne Simonen, and Murat Deveci "The path towards mass manufacturing of optical waveguide combiners via large-area nanoimprinting", Proc. SPIE 11931, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) III, 1193109 (7 March 2022); https://doi.org/10.1117/12.2614310

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