High bandwidth back-scanning mirror for coherent chirped pulse lidar imaging

Andrew D. Oliver; Adam X. Eichhorn; Samantha J. Hampshire; David L. Dickensheets

doi:10.1117/12.2610861

1 March 2022 High bandwidth back-scanning mirror for coherent chirped pulse lidar imaging

Andrew D. Oliver, Adam X. Eichhorn, Samantha J. Hampshire, David L. Dickensheets

Author Affiliations +

Proceedings Volume 12013, MOEMS and Miniaturized Systems XXI; 120130B (2022) https://doi.org/10.1117/12.2610861
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

This paper reports a secondary scan mirror for step-stare lidar applications that is single axis and operates in a non resonant mode. The mirror has a resonant frequency of 61 kHz and a diameter of 2 mm with angular scan range equivalent to 10 resolvable spots at 780 nm. Hand calculations and finite element simulations showed good correlation with experimental results. The mirror, which is 300 μm thick, achieves torsional motion through electrostatic force electrodes placed 3 µm beneath it. Simulations and measurements suggest that static and dynamic mirror deformation remains below the diffraction limit.

Conference Presentation

Citation Download Citation

Andrew D. Oliver, Adam X. Eichhorn, Samantha J. Hampshire, and David L. Dickensheets "High bandwidth back-scanning mirror for coherent chirped pulse lidar imaging", Proc. SPIE 12013, MOEMS and Miniaturized Systems XXI, 120130B (1 March 2022); https://doi.org/10.1117/12.2610861

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE