Miniature NIR spectrometer for mobile applications

M. De Bock; M. Jacobs; K. Raczowski; J. Hermans; K. Tack; R. Lieten; P. Van Wesemael; G. Evangelopoulos; W. van der Tempel; J. Borremans

doi:10.1117/12.2608648

1 March 2022 Miniature NIR spectrometer for mobile applications

M. De Bock, M. Jacobs, K. Raczowski, J. Hermans, K. Tack, R. Lieten, P. Van Wesemael, G. Evangelopoulos, W. van der Tempel, J. Borremans

Author Affiliations +

Proceedings Volume 12013, MOEMS and Miniaturized Systems XXI; 120130E (2022) https://doi.org/10.1117/12.2608648
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

o allow for adoption of optical spectroscopy in mobile and consumer devices, truly miniaturized, low-cost, mass producible spectrometers are needed. We present such a miniature (4mm x 3.2mm x 3.3mm) LGA packaged CMOS spectrometer in the range of 650-900nm and 720-1000nm. It leverages a wafer-level patterned spectral filter technology. The devices include diffuse optics and integrated spectral calibration and embedded corrections processor for part-to-part stable and repeatable performance across input angles and temperature with 68dB dynamic range, 5nm spectral resolution and up to 70 spectra/s. The run-time spectral corrections allow for plug-and-play operation of the sensor, without any need for recalibration in the field. The sensor enables portable spectroscopic applications in smart agriculture, anti-counterfeit, food analysis and skin sensing. For example, the combination of high sensitivity and speed of the spectrometer enables high sampling rate measurement of PPG signals and accurate measurement of heart rate and blood oxygenation (SpO₂).

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Citation Download Citation

M. De Bock, M. Jacobs, K. Raczowski, J. Hermans, K. Tack, R. Lieten, P. Van Wesemael, G. Evangelopoulos, W. van der Tempel, and J. Borremans "Miniature NIR spectrometer for mobile applications", Proc. SPIE 12013, MOEMS and Miniaturized Systems XXI, 120130E (1 March 2022); https://doi.org/10.1117/12.2608648

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