Investigation of atomic emission from tin and heavier elements to heavier elements for further optimization and extension to shorter wavelength of the EUV sources

Akira Sasaki

doi:10.1117/12.2613825

26 May 2022 Investigation of atomic emission from tin and heavier elements to heavier elements for further optimization and extension to shorter wavelength of the EUV sources

Akira Sasaki

Author Affiliations +

Proceedings Volume 12051, Optical and EUV Nanolithography XXXV; 120510N (2022) https://doi.org/10.1117/12.2613825
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Conference Poster

Abstract

We investigate the collisional radiative (CR) model of tin and heavier elements, to accurately predict their EUV emission spectrum to have a useful tool for the optimization of the source to obtain high output power and efficiency at 13.5 nm, as well as in 6 – 7 nm region. Although, tin and heavy elements have a complex atomic structure and the emission occurs through a large number of fine structure transitions, their observed spectrum usually consists of few broad peaks, which are attributed to 4d-4f, 4p-4d, 4d-5p, and 4d-5f transitions. We show a simple representation of their wavelength from the investigation of theoretical and experimental spectrum.

Conference Presentation

Citation Download Citation

Akira Sasaki "Investigation of atomic emission from tin and heavier elements to heavier elements for further optimization and extension to shorter wavelength of the EUV sources", Proc. SPIE 12051, Optical and EUV Nanolithography XXXV, 120510N (26 May 2022); https://doi.org/10.1117/12.2613825

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