Experimental study on damage area and morphology of silicon-based APD detector irradiated by 1064nm continuous laser

Yanpeng Zhang; Di Wang; Zhi Wei; Hongxu Liu; Feichao Fang

doi:10.1117/12.2607033

24 November 2021 Experimental study on damage area and morphology of silicon-based APD detector irradiated by 1064nm continuous laser

Yanpeng Zhang, Di Wang, Zhi Wei, Hongxu Liu, Feichao Fang

Author Affiliations +

Proceedings Volume 12060, AOPC 2021: Advanced Laser Technology and Applications; 120601S (2021) https://doi.org/10.1117/12.2607033
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

In order to study the damage area and morphology of silicon-based APD under different power density and different action time laser irradiation, based on two-dimensional microscopic measurement technology, the damage area and morphology of silicon-based APD were measured with laser power density and action time. The change. The results show that the damage area gradually increases with the increase of laser power density; with the increase of power density, APD produces surface peeling, wrinkles, cracks, pits and other damage effects.

Citation Download Citation

Yanpeng Zhang, Di Wang, Zhi Wei, Hongxu Liu, and Feichao Fang "Experimental study on damage area and morphology of silicon-based APD detector irradiated by 1064nm continuous laser", Proc. SPIE 12060, AOPC 2021: Advanced Laser Technology and Applications, 120601S (24 November 2021); https://doi.org/10.1117/12.2607033

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