3D surface topography measurement of diffractive optical element based on white light interferometry stitching method

Wenwen Lu; Shanyong Chen; Jingyang Guo; Xu Wang; Weiwei Chen

doi:10.1117/12.2604523

13 December 2021 3D surface topography measurement of diffractive optical element based on white light interferometry stitching method

Wenwen Lu, Shanyong Chen, Jingyang Guo, Xu Wang, Weiwei Chen

Author Affiliations +

Proceedings Volume 12072, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics; 120720R (2021) https://doi.org/10.1117/12.2604523
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China

Abstract

Diffractive optical element (DOE) has been widely used in camera lens imaging systems such as mobile phone camera, Monitoring Camera, etc. The measurement of the DOE surface morphology is very important to evaluate the processing quality of the elements, optimize the manufacturing technology and improve the image quality of the imaging system. However, traditional DOE has a small diameter (about 10mm) and the base surface is a wavelength scale 3D relief microstructure. It is a great challenge to realize the high-precision, high-efficiency and multi-scale surface profile measurement of its full aperture. In this paper, new white light interferometry scanning stitching measurement device and method for the 3D surface topography measurement is proposed. Firstly, the white light interferometry scanning stitching measurement device was established. Then, a total of 67 subapertures of the full aperture of the element were measured based on the experimental device. Finally, the profile error of the full aperture was obtained by a microstructural subaperture stitching algorithm. The RMS normal error of the surface profile is 0.3717μm. The measurement results verify the effectiveness of the scanning stitching measurement system and method based on white light interferometer.

Citation Download Citation

Wenwen Lu, Shanyong Chen, Jingyang Guo, Xu Wang, and Weiwei Chen "3D surface topography measurement of diffractive optical element based on white light interferometry stitching method", Proc. SPIE 12072, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics, 120720R (13 December 2021); https://doi.org/10.1117/12.2604523

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KEYWORDS

3D metrology

Diffractive optical elements

Interferometers

Optical components

Optical interferometry

Defense technologies

Measurement devices

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