Paper
1 May 1990 Diffractive lenses utilizing orthogonal cylindrical Fresnel zone plates
Kristopher S. Urquhart, Hamid Farhoosh, Sing H. Lee
Author Affiliations +
Abstract
The curved fringes that exist in spherical diffractive lenses present problems in terms of the computational cost of fracturing the curved fringes into e-beam acceptable shapes, and the fact that the resulting minimum fringe width is limited to several ebeam spot widths. Using orthogonal cylindrical diffractive lenses (OCDL), both of these problems can be overcome because the e-beam data is made up entirely of rectangles. OCDLs also allow different focal lengths in the X and Y directions for new applications. The design and fabrication of OCDLs is presented, along with experimental results.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kristopher S. Urquhart, Hamid Farhoosh, and Sing H. Lee "Diffractive lenses utilizing orthogonal cylindrical Fresnel zone plates", Proc. SPIE 1211, Computer and Optically Formed Holographic Optics, (1 May 1990); https://doi.org/10.1117/12.17937
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Cited by 5 scholarly publications.
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KEYWORDS
Lenses

Diffraction

Etching

Spherical lenses

Zone plates

Semiconductor lasers

Dry etching

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