Holographical image based vibrometry with monochromatic and event based cameras

Simon Hartlieb; Maciej Boguslawski; Tobias Haist; Stephan Reichelt

doi:10.1117/12.2621973

20 May 2022 Holographical image based vibrometry with monochromatic and event based cameras

Simon Hartlieb, Maciej Boguslawski, Tobias Haist, Stephan Reichelt

Proceedings Volume 12137, Optics and Photonics for Advanced Dimensional Metrology II; 1213702 (2022) https://doi.org/10.1117/12.2621973
Event: SPIE Photonics Europe, 2022, Strasbourg, France

Abstract

In this article we show a highly accurate vibration measurement technique based on imaging of multiple light emitters that are attached to the object of interest. Each emitter is holographically replicated to a cluster of spots in the image plane. By averaging the centroids of all replications the position measurement accuracy can be improved. We show, that vibration amplitudes of 100nm can be measured within a measurement field of 148mm×110mm using standard imaging sensors. The standard deviation between our camera setup and a commercial Laser-Doppler-Vibrometer used as reference is σ =0.095 µm in object space, which corresponds to 0.0017 pixels in image space. To overcome the frame rate limitations of standard imaging sensors we also investigate the application of the proposed method to an event based camera. Since the signal no longer consists of grey value images, other approaches have to be developed to reconstruct the object position. One reconstruction approach as well as first experimental results are presented.

Conference Presentation

Citation Download Citation

Simon Hartlieb, Maciej Boguslawski, Tobias Haist, and Stephan Reichelt "Holographical image based vibrometry with monochromatic and event based cameras", Proc. SPIE 12137, Optics and Photonics for Advanced Dimensional Metrology II, 1213702 (20 May 2022); https://doi.org/10.1117/12.2621973

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