Multi-surface measurement at arbitrary positions based on four-surface interferometry

Tingting He; Lin Chang; Yingjie Yu

doi:10.1117/12.2619316

15 February 2022 Multi-surface measurement at arbitrary positions based on four-surface interferometry

Tingting He, Lin Chang, Yingjie Yu

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 121667Z (2022) https://doi.org/10.1117/12.2619316
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

Wavelength-tuning phase-shifting interferometry (WPI) is a feasible method to measure transparent parallel plates. But the existing algorithms are effective when the measurement positions are fixed. To overcome the limitations, this paper proposes a multi-surface measurement method at arbitrary positions based on the four-surface interferometry. The proposed method consists of two parts: a multi-surface phase demodulation algorithm, and a selection technique of the optimal phase-shifting sampling parameters for the measured plates at arbitrary positions. The results of the simulations verify the effectiveness of the proposed algorithm.

Citation Download Citation

Tingting He, Lin Chang, and Yingjie Yu "Multi-surface measurement at arbitrary positions based on four-surface interferometry", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 121667Z (15 February 2022); https://doi.org/10.1117/12.2619316

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