CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 12169 > Article
Paper
28 March 2022 Optimization of the dwell time point sampling step length for ion beam polishing
Xu Zhang, Dasen Wang, Chaoxiang Xia, Xiaojing Li, Ning Pei, Hailin Guo, Fengmin Nei
Author Affiliations +
Proceedings Volume 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications; 12169CU (2022) https://doi.org/10.1117/12.2627393
Event: Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 2021, Kunming, China
Abstract
In order to the dwell time function can be solved quickly and accurately, the sampling step length of the dwell point in the solution process of ion beam polishing dwell time has been optimized. Taking the PV value for per unit of uniform material removal and dwell time as the analysis object, the fluctuation caused of uniform removal and the total dwell time under different dwell time sampling step length are analyzed. The optimal dwell time sampling step length of ion beam polishing is 1.5σ。Using the determined sampling step length, the optical element with a diameter of 50mm is simulated polishing, and the surface PV value of the element decreases from 110.81nm to 20.06 nm. The optical element was polished by ion beam according to the simulation results, the PV value of the element surface decreased from 110.81nm to 46.46nm. The experimental results verify the effectiveness of the simulation results. Using the determined dwell point sampling step length, the dwell time can be solved quickly, and the PV value of the optical elements converges well.
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Xu Zhang, Dasen Wang, Chaoxiang Xia, Xiaojing Li, Ning Pei, Hailin Guo, and Fengmin Nei "Optimization of the dwell time point sampling step length for ion beam polishing", Proc. SPIE 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 12169CU (28 March 2022); https://doi.org/10.1117/12.2627393
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 6 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Ion beams
Polishing
Surface finishing
Optical components
Optical simulations
Shape analysis
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top