Electromagnetic and Ohmic heating analyses for Faraday shield in large and powerful RF ion sources

Qiang Wang; Chao Chen; Na Lu

doi:10.1117/12.2640493

19 October 2022 Electromagnetic and Ohmic heating analyses for Faraday shield in large and powerful RF ion sources

Qiang Wang, Chao Chen, Na Lu

Proceedings Volume 12294, 7th International Symposium on Advances in Electrical, Electronics, and Computer Engineering; 1229419 (2022) https://doi.org/10.1117/12.2640493
Event: 7th International Symposium on Advances in Electrical, Electronics and Computer Engineering (ISAEECE 2022), 2022, Xishuangbanna, China

Abstract

In the high-power radio frequency ion source, a Faraday Shield (FS) with a thin-walled metal structure with slits is placed inside the ceramic tube to protect the wall of the RF ion source chamber from plasma erosion. Due to the complex structure of FS, it has a tremendous influence on the spatial distribution of electromagnetic field and produces a large amount of Ohmic loss in RF discharge. In this contribution, a self-consistent fluid model is applied to study the distribution of electromagnetic field and Ohmic losses on FS in the real plasma environment. The results show that the electric field in the plasma bulk exhibits a maximum at the slit gap, which makes the electrons gain more energy, resulting in a higher electron temperature. The peak of magnetic field appears near the inner side of the coil, which can be owed to the skin effect under high frequency. As for the Ohmic loss of FS, it is mainly distributed on the outer surface of the FS.

Citation Download Citation

Qiang Wang, Chao Chen, and Na Lu "Electromagnetic and Ohmic heating analyses for Faraday shield in large and powerful RF ion sources", Proc. SPIE 12294, 7th International Symposium on Advances in Electrical, Electronics, and Computer Engineering, 1229419 (19 October 2022); https://doi.org/10.1117/12.2640493

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