UV light activated SnO2 thin film gas sensor for nitrogen dioxide sensing at room temperature

Chenyang Liu; Hui Huang; Zhirui Li; Jian Zhao; Pengbo Liu; Zengbing Jin; Dong An; Baoguo Liu; Guangdi Sun; Hongguang Li

doi:10.1117/12.2646589

14 November 2022 UV light activated SnO₂ thin film gas sensor for nitrogen dioxide sensing at room temperature

Chenyang Liu, Hui Huang, Zhirui Li, Jian Zhao, Pengbo Liu, Zengbing Jin, Dong An, Baoguo Liu, Guangdi Sun, Hongguang Li

Proceedings Volume 12299, International Conference on Sustainable Technology and Management (ICSTM 2022); 122990O (2022) https://doi.org/10.1117/12.2646589
Event: International Conference on Sustainable Technology and Management (ICSTM 2022), 2022, Macao, China

Abstract

A UV light activated SnO₂ thin film nitrogen dioxide sensor was fabricated by DC sputtering and oxidation. It can be directly placed in the air to detect the concentration of NO₂ at RT, with a detection limit of 5 ppb. Experiments show that the sensor has good selectivity and stability. SEM, XRD, and TEM characterization indicate that the sample is mainly composed of tetragonal rutile phase SnO₂. The surface presents a rough and porous granular structure, which is suitable for gas adsorption. The effect of operating temperature on NO₂ sensing of SnO₂ thin film gas sensor was systematically investigated. Therefore, the fabricated SnO₂ thin film NO₂ sensor has the promise to greatly reduce power consumption and can be used in a wider range of fields because of its characteristic that it can work normally at RT.

Citation Download Citation

Chenyang Liu, Hui Huang, Zhirui Li, Jian Zhao, Pengbo Liu, Zengbing Jin, Dong An, Baoguo Liu, Guangdi Sun, and Hongguang Li "UV light activated SnO₂ thin film gas sensor for nitrogen dioxide sensing at room temperature", Proc. SPIE 12299, International Conference on Sustainable Technology and Management (ICSTM 2022), 122990O (14 November 2022); https://doi.org/10.1117/12.2646589

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