Research on subaperture stitching optimization algorithm for large flat mirror testing

Zhixuan Zhou; Sen Han; Chunfeng Xu; Quanquan Wang

doi:10.1117/12.2643395

19 December 2022 Research on subaperture stitching optimization algorithm for large flat mirror testing

Zhixuan Zhou, Sen Han, Chunfeng Xu, Quanquan Wang

Proceedings Volume 12319, Optical Metrology and Inspection for Industrial Applications IX; 123191E (2022) https://doi.org/10.1117/12.2643395
Event: SPIE/COS Photonics Asia, 2022, Online Only

Conference Poster

Abstract

To address the problem of high-precision detection of large flat aperture mirror shapes, the current subaperture stitching methods are analyzed. The results show that the full aperture surface shape stitching errors due to subaperture adjustment errors and localization errors are the main reasons affecting the high precision detection. To improve the detection accuracy of subaperture stitching, we propose an immune optimization algorithm for subaperture stitching. The algorithm reduces the influence of subaperture adjustment errors and positioning errors, so that the PV value of reconstructed shape reaches λ/100. It is shown that the proposed method can effectively control the stitching errors and improve the stitching accuracy.

Citation Download Citation

Zhixuan Zhou, Sen Han, Chunfeng Xu, and Quanquan Wang "Research on subaperture stitching optimization algorithm for large flat mirror testing", Proc. SPIE 12319, Optical Metrology and Inspection for Industrial Applications IX, 123191E (19 December 2022); https://doi.org/10.1117/12.2643395

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