Surface functionalisation of transparent materials by selective laser etching

Quentin Broudissou; Laura Gemini; Marc Faucon; Rainer Kling

doi:10.1117/12.2648737

17 March 2023 Surface functionalisation of transparent materials by selective laser etching

Quentin Broudissou, Laura Gemini, Marc Faucon, Rainer Kling

Proceedings Volume 12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; 124080G (2023) https://doi.org/10.1117/12.2648737
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

Selective laser etching (SLE) has demonstrated to be an effective technique to push further the exploitation of laser-based surface functionalisation techniques allowing to reach always smaller surface structures at higher resolution and with controlled aspect-ratios. In this work, SLE is investigated on sapphire as a method to induce different surface functionalities such as antireflective effect and wettability modification. The effect of laser process parameters on the etching rate is evaluated in Gaussian and Bessel laser-beam configurations for KOH etching solution by means of scanning electron microscope (SEM) and confocal microscope analyses.

Conference Presentation

Citation Download Citation

Quentin Broudissou, Laura Gemini, Marc Faucon, and Rainer Kling "Surface functionalisation of transparent materials by selective laser etching", Proc. SPIE 12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, 124080G (17 March 2023); https://doi.org/10.1117/12.2648737

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