Fundamental characteristics of microFLIB (microFabrication using Laser-Induced Bubble) to the thermoset polymer PDMS and its biochip applications

Yoichi Toba; Yasutaka Hanada

doi:10.1117/12.2654179

17 March 2023 Fundamental characteristics of microFLIB (microFabrication using Laser-Induced Bubble) to the thermoset polymer PDMS and its biochip applications

Yoichi Toba, Yasutaka Hanada

Author Affiliations +

Proceedings Volume 12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; 124080N (2023) https://doi.org/10.1117/12.2654179
Event: SPIE LASE, 2023, San Francisco, California, United States

Conference Poster

Abstract

This conference presentation was prepared for the Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII conference at SPIE LASE, 2023.

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Yoichi Toba and Yasutaka Hanada "Fundamental characteristics of microFLIB (microFabrication using Laser-Induced Bubble) to the thermoset polymer PDMS and its biochip applications", Proc. SPIE 12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, 124080N (17 March 2023); https://doi.org/10.1117/12.2654179

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