Paper
8 March 2023 Non-contact surface profiling using optical interferometric microscopy
Author Affiliations +
Proceedings Volume 12428, Photonic Instrumentation Engineering X; 1242814 (2023) https://doi.org/10.1117/12.2650610
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
We report the use of non-contact optical interferometric microscopy (OIM) for surface topographic profiling. A Linnik optical configuration is used to create interferograms of an object surface. When the coherence condition between the two beams is met the phase information of the object surface can be extracted to establish its topographic contour image. Using a four-image phase-shifted algorithm with the synchronization of a piezoelectric actuator reference mirror positioning, the present single camera OIM can reconstruct a surface topography with a field of view of 312 μm × 234 μm, axial resolution of 3.31 nm, and lateral resolution of 488 nm, and an estimated maximum topography depth of 270 nm.
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Diego Palacios, Bowen Zhai, Zihao Liu, and Michael R. Wang "Non-contact surface profiling using optical interferometric microscopy", Proc. SPIE 12428, Photonic Instrumentation Engineering X, 1242814 (8 March 2023); https://doi.org/10.1117/12.2650610
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KEYWORDS
Interferograms

Optical interferometry

Profilometers

Profiling

Optical microscopy

Phase shifts

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