Presentation + Paper
15 March 2023 Imec silicon photonics platforms: performance overview and roadmap
F. J. Ferraro, P. De Heyn, M. Kim, N. Rajasekaran, M. Berciano, G. Muliuk, D. Bode, G. Lepage, S. Janssen, R. Magdziak, J. De Coster, H. Kobbi, S. Lardenois, N. Golshani, L. Shiramin, C. Marchese, S. Rajmohan, S. Nadarajan, N. Singh, S. Radhakrishnan, A. Tsiara, P. Xu, A. Karagoz, D. Yudistira, M. Martire, A. Shahar, M. Chakrabarti, D. Velenis, W. Guo, A. Miller, Kristof Croes, S. Balakrishnan, P. Verheyen, Y. Ban, J. Van Campenhout, P. P. Absil
Author Affiliations +
Abstract
Silicon photonics is now considered the photonics platform of choice for short-reach data center single mode pluggable transceivers. With the emergence of co-packaged optics concepts, it can also enable high performance computing with power-efficient interconnect, but also Lidar system integration or even optical quantum computing. In this paper we will present an overview of what can be achieved in state-of-the-art silicon photonics platforms and we will discuss some of the emerging technology trends. In particular, we will discuss the integration of LPCVD SiN in an active silicon photonics platform.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. J. Ferraro, P. De Heyn, M. Kim, N. Rajasekaran, M. Berciano, G. Muliuk, D. Bode, G. Lepage, S. Janssen, R. Magdziak, J. De Coster, H. Kobbi, S. Lardenois, N. Golshani, L. Shiramin, C. Marchese, S. Rajmohan, S. Nadarajan, N. Singh, S. Radhakrishnan, A. Tsiara, P. Xu, A. Karagoz, D. Yudistira, M. Martire, A. Shahar, M. Chakrabarti, D. Velenis, W. Guo, A. Miller, Kristof Croes, S. Balakrishnan, P. Verheyen, Y. Ban, J. Van Campenhout, and P. P. Absil "Imec silicon photonics platforms: performance overview and roadmap", Proc. SPIE 12429, Next-Generation Optical Communication: Components, Sub-Systems, and Systems XII, 1242909 (15 March 2023); https://doi.org/10.1117/12.2650579
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Silicon nitride

Low pressure chemical vapor deposition

Silicon

Waveguides

Silicon photonics

Semiconducting wafers

Plasma enhanced chemical vapor deposition

RELATED CONTENT


Back to Top