Electron induced chemical transformations in model resist materials

Oleg Kostko; Terry McAfee; Patrick Naulleau

doi:10.1117/12.2661596

30 April 2023 Electron induced chemical transformations in model resist materials

Oleg Kostko, Terry McAfee, Patrick Naulleau

Proceedings Volume 12498, Advances in Patterning Materials and Processes XL; 124981Z (2023) https://doi.org/10.1117/12.2661596
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Conference Poster

Abstract

In EUV resists, due to the high energy of the incident photons, most of the radiation chemistry arises from the emitted electrons and not the EUV photons themselves. The absorption of an EUV photon by a resist film leads to the emission of a primary electron, which, through a cascade of inelastic scattering events, causes the excitation of molecules and emission of secondary electrons. Those electrons play a leading role in EUV patterning, initiating chemical transformations. To characterize electron induced chemical transformations in photoresist materials we exposed thin films of model resists to an electron beam and quantified electron induced changes employing FTIR spectroscopy. Combination of polymers with PAG served as model resists. Employed electron energies varied from 20 to 80 eV to study the effect of fast primary electrons as well as slow secondary electrons on photoresists.

Citation Download Citation

Oleg Kostko, Terry McAfee, and Patrick Naulleau "Electron induced chemical transformations in model resist materials", Proc. SPIE 12498, Advances in Patterning Materials and Processes XL, 124981Z (30 April 2023); https://doi.org/10.1117/12.2661596

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available