Inverse doping profile extraction as an enabling tool for accurate SPAD modeling

Andrea Bonzi; Gabriele Laita; Ivan Rech; Angelo Gulinatti

doi:10.1117/12.2665696

15 June 2023 Inverse doping profile extraction as an enabling tool for accurate SPAD modeling

Andrea Bonzi, Gabriele Laita, Ivan Rech, Angelo Gulinatti

Proceedings Volume 12512, Advanced Photon Counting Techniques XVII; 1251207 (2023) https://doi.org/10.1117/12.2665696
Event: SPIE Defense + Commercial Sensing, 2023, Orlando, Florida, United States

Abstract

Physical models are key tools for developing new SPADs structures. However, as most SPADs characteristics strongly depends on the electric field, a precise knowledge of the doping profile is required. Unfortunately, common profiling techniques are not accurate enough. To cope with this problem, we developed an inverse approach which resorts to the combined use of electrical simulations and capacitance-voltage measurements. We applied the technique to multiple SPADs and we used the extracted profile to calculate their breakdown voltages. Simulated results closely matching the experimental outcomes provide us a strong validation of the proposed extraction technique.

Conference Presentation

Citation Download Citation

Andrea Bonzi, Gabriele Laita, Ivan Rech, and Angelo Gulinatti "Inverse doping profile extraction as an enabling tool for accurate SPAD modeling", Proc. SPIE 12512, Advanced Photon Counting Techniques XVII, 1251207 (15 June 2023); https://doi.org/10.1117/12.2665696

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