Presentation + Paper
15 June 2023 New spectrometer for non-medical high-precision frequency domain optical coherence tomography
Author Affiliations +
Abstract
We present a novel cost-effective high spectral resolution and small bandwidth spectrometer for the fiber optic frequency domain optical coherence tomography (FD-OCT) for thin wafer semiconductor applications. The spectrometer employs achromatic dispersive optics. We also present a novel method for calibration of this narrow bandwidth spectrometer using a fiber optic Michelson interferometer.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wojtek J. Walecki "New spectrometer for non-medical high-precision frequency domain optical coherence tomography", Proc. SPIE 12516, Next-Generation Spectroscopic Technologies XV, 125160I (15 June 2023); https://doi.org/10.1117/12.2660668
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KEYWORDS
Spectroscopy

Optical coherence tomography

Semiconducting wafers

Metrology

Semiconductors

Calibration

Detector arrays

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