Applications of projection fringes and structured light surface metrology for semiconductor packaging and their challenges

Wojtek J. Walecki

doi:10.1117/12.2663267

15 June 2023 Applications of projection fringes and structured light surface metrology for semiconductor packaging and their challenges

Wojtek J. Walecki

Author Affiliations +

Proceedings Volume 12524, Dimensional Optical Metrology and Inspection for Practical Applications XII ; 125240K (2023) https://doi.org/10.1117/12.2663267
Event: SPIE Defense + Commercial Sensing, 2023, Orlando, Florida, United States

Conference Poster

Abstract

In our paper, we discuss applications of projection fringes and structured light surface metrology for measurements of the topography of specular and diffuse surfaces in semiconductor manufacturing. We report recent progress in the projection fringes metrology applied to the packaging of crystalline solar cells, and heat sinks for power devices. In addition, we also discuss the progress of metrology of highly reflective surfaces encountered in thin film solar cell manufacturing and cell phone production. We discuss factors limiting the accuracy and speed of these methods.

Citation Download Citation

Wojtek J. Walecki "Applications of projection fringes and structured light surface metrology for semiconductor packaging and their challenges", Proc. SPIE 12524, Dimensional Optical Metrology and Inspection for Practical Applications XII , 125240K (15 June 2023); https://doi.org/10.1117/12.2663267

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available