Paper
14 February 2023 Design of a photoconductive graphene infrared sensor based on inverted fluorination
Fangwei Yang, Xiaochen Ma, Fengsong Qian, Liangchen Hu, Chen Xu
Author Affiliations +
Proceedings Volume 12589, International Conference on Optical Technology, Semiconductor Materials, and Devices (OTSMD 2022); 1258905 (2023) https://doi.org/10.1117/12.2668466
Event: International Conference on Optical Technology, Semiconductor Materials, and Devices (OTSMD 2022), 2022, Longyan, China
Abstract
Infrared detectors are widely used in night vision imaging, security inspection, medical testing, environmental monitoring and other fields. Infrared detectors based on two-dimensional materials have become a research hotspot. A photoconductive graphene infrared detector based on inverted fluorination is introduced in this paper. An inverted fluorination method is adopted to reduce the physical bombardment damage to graphene and reduce the difficulty of graphene fluorination regulation. The Raman spectrum mapping of fluorinated graphene is analyzed. The variation of graphene Raman spectrum and infrared response against fluorination time is investigated, clarifying the properties of fluorinated graphene suitable for infrared sensing. The graphene sensor shows the highest responsivity when the value of ID/ID' peak ratio of the graphene Raman spectrum is the lowest. The photoconductive graphene infrared sensor based on controllable inverted fluorination process has the advantages of simple structure, high process feasibility.
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fangwei Yang, Xiaochen Ma, Fengsong Qian, Liangchen Hu, and Chen Xu "Design of a photoconductive graphene infrared sensor based on inverted fluorination", Proc. SPIE 12589, International Conference on Optical Technology, Semiconductor Materials, and Devices (OTSMD 2022), 1258905 (14 February 2023); https://doi.org/10.1117/12.2668466
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KEYWORDS
Graphene

Sensors

Raman spectroscopy

Infrared sensors

Electrodes

Glasses

Reactive ion etching

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