Design of solid-state nanopores for nanoparticle identification

Yiheng Che

doi:10.1117/12.2674046

9 March 2023 Design of solid-state nanopores for nanoparticle identification

Yiheng Che

Proceedings Volume 12600, International Conference on Optoelectronic Materials and Devices (ICOMD 2022); 126000R (2023) https://doi.org/10.1117/12.2674046
Event: 2022 International Conference on Optoelectronic Materials and Devices, 2022, Chongqing, China

Abstract

The size of nanoparticles plays a crucial role in understanding the properties of nanomaterials. In this study, a solid-state nanopore sensor device for nanopore particle size identification is developed. The sensor comprises a silicon-based silicon nitride nanopore chip with a low aspect ratio, which was fabricated using a semiconductor process. The chip was used to characterize and analyze carboxyl-modified polystyrene particles. Several different algorithms are used to distinguish the translocation signals of particles of different sizes as they pass through the nanopore. This sensing method shows promise for the detection of proteins and other nanoparticles.

Citation Download Citation

Yiheng Che "Design of solid-state nanopores for nanoparticle identification", Proc. SPIE 12600, International Conference on Optoelectronic Materials and Devices (ICOMD 2022), 126000R (9 March 2023); https://doi.org/10.1117/12.2674046

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