Parallel optics metrology using a Shack-Hartmann approach

Rakchanok Rungsawang; Rafael Porcar; Xavier Levecq; Nicolas Lefaudeux

doi:10.1117/12.3005549

20 September 2023 Parallel optics metrology using a Shack-Hartmann approach

Rakchanok Rungsawang, Rafael Porcar, Xavier Levecq, Nicolas Lefaudeux

Proceedings Volume 12607, Optical Technology and Measurement for Industrial Applications Conference; 126070K (2023) https://doi.org/10.1117/12.3005549
Event: Optics and Photonics International Congress, 2023, Yokohama, Japan

Abstract

We will present an innovative method for the measurement of Parallel Optics or optics with parallel surfaces, often planes such as windows, filters, and mirrors, but also potentially spherical in the case of domes. This new and patented approach solves issues related to the metrology of this type of sample, mainly associated with the signal reflected by the back surface of the substrate. Instead, and with no extra hardware or specific optical add-on making the testing more complicated and expensive, our implementation allows for a straightforward characterization of Parallel Optics with no manipulation of the sample, nor preparation of any kind. We will present the concept as well as its implementation and results obtained on samples as compared with other historic reference techniques.

Citation Download Citation

Rakchanok Rungsawang, Rafael Porcar, Xavier Levecq, and Nicolas Lefaudeux "Parallel optics metrology using a Shack-Hartmann approach", Proc. SPIE 12607, Optical Technology and Measurement for Industrial Applications Conference, 126070K (20 September 2023); https://doi.org/10.1117/12.3005549

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