Double-reflection confocal probe for surface profiling microscopy with improved axial resolution

K. U. Hii; H. T. Su

doi:10.1117/12.3005555

20 September 2023 Double-reflection confocal probe for surface profiling microscopy with improved axial resolution

K. U. Hii, H. T. Su

Proceedings Volume 12607, Optical Technology and Measurement for Industrial Applications Conference; 126070N (2023) https://doi.org/10.1117/12.3005555
Event: Optics and Photonics International Congress, 2023, Yokohama, Japan

Abstract

A double-reflection confocal probe technique for surface profiling microscopy is presented. By delivering a small collimated laser beam at an off-axis position into a microscope objective to allow retro-reflection on the first reflected beam from the surface under test, second reflection at the same point of the test surface can be established. The feasibility of this technique is experimental investigated. This approach improves the axial resolution by a factor of two as compared to that of the conventional single-reflection system. Simulation is performed to estimate and evaluate the lateral scanning performance of the double-reflection system.

Citation Download Citation

K. U. Hii and H. T. Su "Double-reflection confocal probe for surface profiling microscopy with improved axial resolution", Proc. SPIE 12607, Optical Technology and Measurement for Industrial Applications Conference, 126070N (20 September 2023); https://doi.org/10.1117/12.3005555

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