Implementation of a new algorithm for resolution enhancement in wavefront sensing-based metrology

Rafael Porcar; Xavier Levecq; Pauline Treimany

doi:10.1117/12.2673705

16 August 2023 Implementation of a new algorithm for resolution enhancement in wavefront sensing-based metrology

Rafael Porcar, Xavier Levecq, Pauline Treimany

Proceedings Volume 12618, Optical Measurement Systems for Industrial Inspection XIII; 1261819 (2023) https://doi.org/10.1117/12.2673705
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

We will present a new approach of linearized focal plane technique (LIFT), formerly developed by ONERA, which results in an improvement of a factor of 16 (4x4) of the spatial resolution. This technology is based on the combination of standard SH technology with phase retrieval algorithms applied on all spots of the microlens array that provides information on high spatial frequencies. We will show some measurements performed on extremely complex wavefronts. This technology presents very promising perspectives for optical and freeform metrology and can advantageously replace, at lower cost and better usability, Fizeau interferometry.

Conference Presentation

Citation Download Citation

Rafael Porcar, Xavier Levecq, and Pauline Treimany "Implementation of a new algorithm for resolution enhancement in wavefront sensing-based metrology", Proc. SPIE 12618, Optical Measurement Systems for Industrial Inspection XIII, 1261819 (16 August 2023); https://doi.org/10.1117/12.2673705

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