Poster
10 August 2023 Coaxial deflectometry: absolute shape measurement with interferometric accuracy
Yves Surrel, Maxime Bordoux
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Conference Poster
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© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yves Surrel and Maxime Bordoux "Coaxial deflectometry: absolute shape measurement with interferometric accuracy", Proc. SPIE 12618, Optical Measurement Systems for Industrial Inspection XIII, 126182H (10 August 2023); https://doi.org/10.1117/12.2673699
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KEYWORDS
Deflectometry

Interferometry

Equipment

Optical surfaces

Nulling interferometry

Optical alignment

Optical metrology

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