An innovative approach to measuring radius of curvature and form error of spherical optics with an interferometer

Ravi P. Singh; Yaolong Chen

doi:10.1117/12.2674167

7 August 2023 An innovative approach to measuring radius of curvature and form error of spherical optics with an interferometer

Ravi P. Singh, Yaolong Chen

Author Affiliations +

Proceedings Volume 12624, Digital Optical Technologies 2023; 126241P (2023) https://doi.org/10.1117/12.2674167
Event: SPIE Digital Optical Technologies, 2023, Munich, Germany

Conference Poster

Abstract

Quality control is a critical aspect in the manufacturing of high-quality optical components. However, the traditional metrology techniques of sag meters and test plates are often performed as the final step in the polishing process, leading to an increased number of defective parts and increased production costs caused by the need for many test plates. In this paper, we present an innovative approach to measuring the radius of curvature and form error using an interferometer. The traditional method needs a pair of test plates for each curvature radius. This could cause very high costs in storage and maintenance for long-term use. In contrast, an interferometer can measure different radii of workpieces and is highly accurate. The measured data can be used in a closed-loop feedback system to compensate for form error and radius errors in CNC-controlled polishing machines. This innovative approach will significantly improve flexibility and reduce the costs of the polishing process.

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Ravi P. Singh and Yaolong Chen "An innovative approach to measuring radius of curvature and form error of spherical optics with an interferometer", Proc. SPIE 12624, Digital Optical Technologies 2023, 126241P (7 August 2023); https://doi.org/10.1117/12.2674167

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