Comparison of projection and proximity printings--from UV to x ray

Burn Jeng Lin

doi:10.1117/12.20147

1 May 1990 Comparison of projection and proximity printings--from UV to x ray

Burn Jeng Lin

Proceedings Volume 1263, Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX; (1990) https://doi.org/10.1117/12.20147
Event: Microlithography '90, 1990, San Jose, CA, United States

Abstract

Projection and proximity printings are compared in terms of linewidth tolerance. Computer simulated exposure-defocus and gap-exposure diagrams are used to characterize the two techniques respectively. The depth of focus for projection printing in terms of the universal depth parameter k2 is evaluated as a function of the universal width parameter k1, for five long and short representative lithographic features, then three long features. Similarly, the depth of focus and working distance for proximity printing are evaluated for a O.25-jm system in x-ray and 2.5-,um system in uv and some preliminary comparison to experimental results is shown. The image contours and depth of focus of the two imaging techniques are compared. Proximity effects are present for both techniques. The distinction of working distance and depth of focus for proximity printing is observed for the first time. Against intuition, a shorter mask-to-wafer gap is not always better.

Citation Download Citation

Burn Jeng Lin "Comparison of projection and proximity printings--from UV to x ray", Proc. SPIE 1263, Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX, (1 May 1990); https://doi.org/10.1117/12.20147

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available