Ultraviolet CMOS sensors with integrated filter coatings for the UVEX mission

John J. Hennessy; Robin E. Rodríguez; April D. Jewell; Michael E. Hoenk; Shouleh Nikzad; Brian W. Grefenstette; Timothee Greffe; Roger M. Smith; Hannah P. Earnshaw; Fiona A. Harrison

doi:10.1117/12.2677968

27 September 2023 Ultraviolet CMOS sensors with integrated filter coatings for the UVEX mission

John J. Hennessy, Robin E. Rodríguez, April D. Jewell, Michael E. Hoenk, Shouleh Nikzad, Brian W. Grefenstette, Timothee Greffe, Roger M. Smith, Hannah P. Earnshaw, Fiona A. Harrison

Author Affiliations +

Proceedings Volume 12678, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XXIII; 126780K (2023) https://doi.org/10.1117/12.2677968
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

We report on the development of metal-dielectric bandpass filters that can be integrated with back-illuminated CMOS imaging sensors for operation at far ultraviolet wavelengths (FUV, 90-200 nm). These coatings utilize previous developments in atomic layer deposition (ALD) processes for transparent dielectric materials which are combined with evaporated aluminum layers in multilayer structures. Planar coatings can produce an FUV bandpass response that allows broadband silicon imaging sensors to operate with visible and solar blindness. We describe the fabrication and optical characterization of these coatings, and describe the development of delta-doped detectors integrating these coatings that are motivated by the performance requirements of the NASA astrophysics mission Ultraviolet Explorer (UVEX), currently undergoing a Phase A concept study. We also describe the extension of this concept to include graded thickness dielectric layers deposited by ALD. We show that a graded lateral thickness can be engineered in a variety of thermal ALD processes by depositing into a shallow horizontal cavity. This allows for the fabrication of detector-integrated filter coatings with a spatially-varying response that can be matched to the spectral dispersion of the planned UVEX spectrograph channel. Prototype graded coatings are demonstrated over areas up to 4 x 4 cm, and characterized for optical performance and environmental stability.

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John J. Hennessy, Robin E. Rodríguez, April D. Jewell, Michael E. Hoenk, Shouleh Nikzad, Brian W. Grefenstette, Timothee Greffe, Roger M. Smith, Hannah P. Earnshaw, and Fiona A. Harrison "Ultraviolet CMOS sensors with integrated filter coatings for the UVEX mission", Proc. SPIE 12678, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XXIII, 126780K (27 September 2023); https://doi.org/10.1117/12.2677968

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KEYWORDS

Optical coatings

Tunable filters

Ultraviolet radiation

Atomic layer deposition

CMOS sensors

Far ultraviolet

Coating thickness

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