Design of a high phase-shift efficiency wide-tuning silicon nitride filter

Qichao Wang; Qiang Zhang; Xinyan Ma; Kun Yin; Hui Yu

doi:10.1117/12.2685992

28 November 2023 Design of a high phase-shift efficiency wide-tuning silicon nitride filter

Qichao Wang, Qiang Zhang, Xinyan Ma, Kun Yin, Hui Yu

Proceedings Volume 12764, Optoelectronic Devices and Integration XII; 1276406 (2023) https://doi.org/10.1117/12.2685992
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

Silicon nitride photonic integrated circuits with ultra-low loss are widely used in applications such as telecommunications and optical sensing. However, the radiation loss increases rapidly as the radius is reduced, resulting in large-sized silicon nitride photonic integrated circuits. The weak thermo-optical effect limits the high-efficiency, low-power consumption applications. In this paper, a stepped index waveguide structure is studied to reduce the bending loss by enhancing the mode confinement. A bend with a radius of 30μm is designed using Ansys MODE. Polymer with a high thermo-optic coefficient is used as the cladding of the silicon nitride waveguide to improve the tuning performance of the phase shifter. The grooves around the waveguide also acts as an adiabatic trench to increase the efficiency of the thermal electrode. A π phase shift under thermal tuned power of 7.5mW is achieved with a 300μm long silicon nitride waveguide. Finally, a cascaded silicon nitride micro-ring resonator with radius of 50μm is designed to achieve an efficient filter with a wide tuning range of 116nm. This scheme provides a novel approach for high-density, wide-tunable and miniaturized devices in silicon nitride photonic integrated circuits.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Qichao Wang, Qiang Zhang, Xinyan Ma, Kun Yin, and Hui Yu "Design of a high phase-shift efficiency wide-tuning silicon nitride filter", Proc. SPIE 12764, Optoelectronic Devices and Integration XII, 1276406 (28 November 2023); https://doi.org/10.1117/12.2685992

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KEYWORDS

Silicon nitride

Waveguides

Tunable filters

Design and modelling

Phase shifts

Cladding

Light sources

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