Imaging of MEMS morphology and deformation based on digital holography

Shuaibing Chen; Jiahao Wu; Zhenkai Chen; Lei Shao; Wenjing Zhou

doi:10.1117/12.2686805

27 November 2023 Imaging of MEMS morphology and deformation based on digital holography

Shuaibing Chen, Jiahao Wu, Zhenkai Chen, Lei Shao, Wenjing Zhou

Proceedings Volume 12768, Holography, Diffractive Optics, and Applications XIII; 127680H (2023) https://doi.org/10.1117/12.2686805
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

Microelectromechanical systems (MEMS) are electronic devices with movable micromechanical structures, which possess morphology and deformation in scales difficult to observe by traditional microscopic methods. In this paper, the surface morphology and deformation value of MEMS with complex structure was recovered by digital holographic technology, and the high precision detection of MEMS was realized. The local magnification was carried out through the microscope objective lens, and the magnification was calibrated by the resolution test chart. Due to the introduction of spherical wave by the magnification of the objective lens, this paper carried out the elimination of the quadratic term error. The shape of the comb tooth was reconstructed by setting a mask in the phase disturbance area. The deformation of the surface before and after voltage applied was measured, and the actual displacement deformation value was solved.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Shuaibing Chen, Jiahao Wu, Zhenkai Chen, Lei Shao, and Wenjing Zhou "Imaging of MEMS morphology and deformation based on digital holography", Proc. SPIE 12768, Holography, Diffractive Optics, and Applications XIII, 127680H (27 November 2023); https://doi.org/10.1117/12.2686805

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