Ion beam machining for efficient manufacturing of high-end optical components

Christian Schindler

doi:10.1117/12.3011269

30 November 2023 Ion beam machining for efficient manufacturing of high-end optical components

Christian Schindler

Proceedings Volume 12778, Optifab 2023; 127780G (2023) https://doi.org/10.1117/12.3011269
Event: SPIE Optifab, 2023, Rochester, New York, United States

Abstract

Ion beam machining has a long tradition in the production of classical high-end optical components. Sophisticated telescopic or lithographic optics have long been made possible by deterministic and highly reproducible focused ion beam machining on various materials of optical technologies. The entire process of producing such delicate components as spheres, aspheres, plano optics or freeforms still depends heavily on the optician's experience and ultimate patience in mastering the alternation between interferometric inspection and the highly-precise, locally determined material removal. With focussed ion beam machining lowest figure errors in PV of less than lambda/200 and micro-roughness values of less than rms = 0.1 nm can be achieved through precisely planned iterative machining. In contrast to long-lasting production, today's industrial and research applications in the fields of precision optics and semiconductors demand the same or higher qualities, but also higher quantities and productivities. New process approaches have to be found and descriptions for higher material removal without compromising quality have to be created. The authors discuss how productivity can be implemented in ion beam machining.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Christian Schindler "Ion beam machining for efficient manufacturing of high-end optical components", Proc. SPIE 12778, Optifab 2023, 127780G (30 November 2023); https://doi.org/10.1117/12.3011269

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KEYWORDS

Ion beams

Optical components

Manufacturing

Aspheric optics

Freeform optics

Optics manufacturing

Plano

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