Measurement of surface form of cylindrical optics using non-contact multiwavelength interferometry

Jayesh Navare; Lei Ren; Marc Wendel; Nina Hennemann; Neil Fitzgibbon; Yang Yu

doi:10.1117/12.2685156

29 November 2023 Measurement of surface form of cylindrical optics using non-contact multiwavelength interferometry

Jayesh Navare, Lei Ren, Marc Wendel, Nina Hennemann, Neil Fitzgibbon, Yang Yu

Proceedings Volume 12778, Optifab 2023; 127780H (2023) https://doi.org/10.1117/12.2685156
Event: SPIE Optifab, 2023, Rochester, New York, United States

Abstract

This paper investigates the feasibility of measuring surface form of cylindrical optics using non-contact multiwavelength interferometry. Two plano-convex lenses, one with an acylindrical prescription and the other with a cylindrical prescription were measured on a non-contact multiwavelength interferometer and their surface form error was evaluated. To corroborate the results obtained from this, the two lenses were measured on a contact type PGI (phase grating interferometer) gauge, and the peak-to-valley (PV), root mean square (RMS), and radius of curvature (RoC) parameters were quantified to compare the 3D height maps obtained from these two different measurement methods. It is shown that there is a good agreement between the multiwavelength interferometer and PGI gauge and the key differences including measurement setup and cycle time between the two methods are discussed.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jayesh Navare, Lei Ren, Marc Wendel, Nina Hennemann, Neil Fitzgibbon, and Yang Yu "Measurement of surface form of cylindrical optics using non-contact multiwavelength interferometry", Proc. SPIE 12778, Optifab 2023, 127780H (29 November 2023); https://doi.org/10.1117/12.2685156

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