Simulation of multilayer thin-film piezoceramic actuators in COMSOL Multiphysics 6.0

D. V. Baboshko; E. V. Shesterikov; I. V. Kulinich

doi:10.1117/12.2690755

17 October 2023 Simulation of multilayer thin-film piezoceramic actuators in COMSOL Multiphysics 6.0

D. V. Baboshko, E. V. Shesterikov, I. V. Kulinich

Proceedings Volume 12780, 29th International Symposium on Atmospheric and Ocean Optics: Atmospheric Physics; 1278015 (2023) https://doi.org/10.1117/12.2690755
Event: XXIX International Symposium "Atmospheric and Ocean Optics, Atmospheric Physics", 2023, Moscow, Russian Federation

Abstract

The mechanical properties of multilayer thin-film piezoceramic structures have been studied. The results of simulation of multilayer piezoelectric actuators are presented.

Citation Download Citation

D. V. Baboshko, E. V. Shesterikov, and I. V. Kulinich "Simulation of multilayer thin-film piezoceramic actuators in COMSOL Multiphysics 6.0", Proc. SPIE 12780, 29th International Symposium on Atmospheric and Ocean Optics: Atmospheric Physics, 1278015 (17 October 2023); https://doi.org/10.1117/12.2690755

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