VSLI mask making in Japan

Masanori Sakoda

doi:10.1117/12.3011319

10 October 2023 VSLI mask making in Japan

Masanori Sakoda

Proceedings Volume 12807, Bay Area Chrome Users Society Symposium 1983; 1280705 (2023) https://doi.org/10.1117/12.3011319
Event: 3rd Annual BACUS Symposium, 1983, Santa Clara, CA, United States

Abstract

The table of contents of this speech: First, photo mask image and hard surface mask. Second is photo mask blank chrome see through tantalum photomask blank. Third is hot mask making process. Fourth is photomask inspection. Fifth is future hot mask specifications.

Citation Download Citation

Masanori Sakoda "VSLI mask making in Japan", Proc. SPIE 12807, Bay Area Chrome Users Society Symposium 1983, 1280705 (10 October 2023); https://doi.org/10.1117/12.3011319

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