Measurement and analysis of Si3N4 particles by infrared spectrum

Xiaoli Wang; Yanan Li; Sai Wei; Xinghua Li; Han Yu

doi:10.1117/12.2688359

6 November 2023 Measurement and analysis of Si₃N₄ particles by infrared spectrum

Xiaoli Wang, Yanan Li, Sai Wei, Xinghua Li, Han Yu

Proceedings Volume 12921, Third International Computing Imaging Conference (CITA 2023); 129211H (2023) https://doi.org/10.1117/12.2688359
Event: Third International Computing Imaging Conference (CITA 2023), 2023, Sydney, Australia

Abstract

In this paper, the principle of Attenuated Total Reflection (ATR) is used to test and study the silicon nitride particle samples, and the influence of particle size, shape and crystal phase on its infrared spectral performance is emphatically analyzed. It is found that the larger the particle size of Si₃N₄ is, the more its extinction peak moves to the long wave. The smaller the particle size is, the lower the extreme value of infrared transmission in the characteristic spectrum segment is. For Si₃N₄ particles of the same scale, spherical like particles can obtain lower infrared transmittance, while cylindrical like ones show a wider range of infrared absorption bands. Under the same shape and similar scale, α phase Si₃N₄ particles have better infrared absorption than β phase.

Citation Download Citation

Xiaoli Wang, Yanan Li, Sai Wei, Xinghua Li, and Han Yu "Measurement and analysis of Si₃N₄ particles by infrared spectrum", Proc. SPIE 12921, Third International Computing Imaging Conference (CITA 2023), 129211H (6 November 2023); https://doi.org/10.1117/12.2688359

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available