Group technology in multichamber and in-situ processing

Su-Shing Chen

doi:10.1117/12.21109

1 January 1990 Group technology in multichamber and in-situ processing

Su-Shing Chen

Proceedings Volume 1293, Applications of Artificial Intelligence VIII; (1990) https://doi.org/10.1117/12.21109
Event: 1990 Technical Symposium on Optics, Electro-Optics, and Sensors, 1990, Orlando, FL, United States

Abstract

Group technology is a useful technique of general manufacturing systems that provides production efficiency in fabrication of similar but not identical devices on the same machines. In this paper, we extend this concept to computer-integrated- manufacturing of custom VLSI semiconductor devices, particularly in the area of multichamber and in-situ processing.

Citation Download Citation

Su-Shing Chen "Group technology in multichamber and in-situ processing", Proc. SPIE 1293, Applications of Artificial Intelligence VIII, (1 January 1990); https://doi.org/10.1117/12.21109

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