Nanopores with customized 3D shape: tailored structures for nanoscale applications

German Lanzavecchia; Anastasiia Sapunova; Ali Douaki; Shukun Weng; Roman Krahne

doi:10.1117/12.3022456

10 June 2024 Nanopores with customized 3D shape: tailored structures for nanoscale applications

German Lanzavecchia, Anastasiia Sapunova, Ali Douaki, Shukun Weng, Roman Krahne

Proceedings Volume 12991, Nanophotonics X; 129910Q (2024) https://doi.org/10.1117/12.3022456
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

We present a versatile method to fabricate conical nanopores of different materials and shapes on silicon/silicon nitride chips for various nanoscale applications. We drilled silicon nitride membranes coated with photoresist with Focused Ion Beam (FIB) calibrated to the desired shape, followed by atomic layer deposition of a dielectric oxide and subsequent photoresist removal and annealing. We obtained conical nanopores made of SiO₂ and Al2O₃ on a silicon nitride membrane. We characterized the samples electrically, with Scanning Electron Microscopy (SEM), cross sections and Energy-Dispersive X-ray spectroscopy (EDX). We studied concave, straight, and convex nanopore shapes and measured their ionic current rectification effects, which vary with the nanopore geometry. We supported our experimental findings with numerical simulations based on the Poisson-Nernst-Planck model. With the addition of a metallic layer, we conducted enhanced Raman spectroscopy experiments to confirm the capacity of our structures to perform as tailored plasmonic antennas. Our results confirm the robustness and tunability of this fabrication method to produce conical nanopores of dielectric oxides for a wide range of applications and the potential of controlling the nanopore geometry.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

German Lanzavecchia, Anastasiia Sapunova, Ali Douaki, Shukun Weng, and Roman Krahne "Nanopores with customized 3D shape: tailored structures for nanoscale applications", Proc. SPIE 12991, Nanophotonics X, 129910Q (10 June 2024); https://doi.org/10.1117/12.3022456

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available