Depth detection of optical surface defects based on transport of intensity equation

Ying Gao; Hongjun Wang; Ailing Tian; Xueliang Zhu; Bingcai Liu

doi:10.1117/12.3014514

4 March 2024 Depth detection of optical surface defects based on transport of intensity equation

Ying Gao, Hongjun Wang, Ailing Tian, Xueliang Zhu, Bingcai Liu

Proceedings Volume 13070, Speckle 2023: VIII International Conference on Speckle Metrology; 130700K (2024) https://doi.org/10.1117/12.3014514
Event: Speckle 2023: VIII International Conference on Speckle Metrology, 2023, Xi'an, China

Abstract

For the three-dimensional detection of surface defects on optical components, the article proposes to apply the Transport of Intensity Equation (TIE) algorithm to the scattering method in detecting the depth of defects on the surface of optical element. Firstly, a simulation model is established to simulate the scattering light distribution caused by the surface defects, and then use the TIE algorithm to obtain the phase of the surface scratch, finally the depth of the scratch is calculated by the modulation characteristics of the surface scratch on the phase. The correlation coefficient and the relative root-mean-square error are used to evaluate the effectiveness of the algorithm and compared with the Angular Spectrum iterative algorithm. Numerical simulation results show that the TIE algorithm can realize the reconstruction of the depth of defects on the surface of optical elements, and the reconstructed scratch depth has a small relative error and high reconstruction accuracy. The proposed method is flexible and fast, thus suitable for practical industrial applications.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Ying Gao, Hongjun Wang, Ailing Tian, Xueliang Zhu, and Bingcai Liu "Depth detection of optical surface defects based on transport of intensity equation", Proc. SPIE 13070, Speckle 2023: VIII International Conference on Speckle Metrology, 130700K (4 March 2024); https://doi.org/10.1117/12.3014514

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KEYWORDS

Optical surfaces

Reconstruction algorithms

Optical components

Scattered light

Light scattering

Defect detection

Correlation coefficients

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