Flexible MEMS temperature sensors based on Inkjet printing technology

Sheng Wu; Zechen Hu; Nian Jiang; Yifeng Huang; Lulu Li; Fan Xu; Jie Shang; Deyan Hu; Yang Liu

doi:10.1117/12.3029370

6 May 2024 Flexible MEMS temperature sensors based on Inkjet printing technology

Sheng Wu, Zechen Hu, Nian Jiang, Yifeng Huang, Lulu Li, Fan Xu, Jie Shang, Deyan Hu, Yang Liu

Proceedings Volume 13107, Fourth International Conference on Sensors and Information Technology (ICSI 2024); 131070E (2024) https://doi.org/10.1117/12.3029370
Event: Fourth International Conference on Sensors and Information Technology (ICSI 2024), 2024, Xiamen, China

Abstract

Flexible MEMS products can possess unique characteristics such as high stretchability, low modulus, easy deformation, good biocompatibility, and affordability, which have greater potential and application value than traditional sensors. In this paper, we fabricate a flexible MEMS temperature sensor based on inkjet printing technology and the new sensing material PEDOT: PSS, and design the matching external acquisition circuit. For the sensors designed in this paper, we analyze them experimentally from the perspectives of substrate, line width, temperature sensitivity, and fitting equation, respectively. The results show that the sensors designed in this paper are in good agreement and have high temperature sensitivity, and the TCR are kept around -0.6%. Meanwhile the exponential equation is the best fitting equation for the sensor in this paper, with the best fitting effect and the highest fitting stability.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Sheng Wu, Zechen Hu, Nian Jiang, Yifeng Huang, Lulu Li, Fan Xu, Jie Shang, Deyan Hu, and Yang Liu "Flexible MEMS temperature sensors based on Inkjet printing technology", Proc. SPIE 13107, Fourth International Conference on Sensors and Information Technology (ICSI 2024), 131070E (6 May 2024); https://doi.org/10.1117/12.3029370

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KEYWORDS

Sensors

Inkjet technology

Printing

Microelectromechanical systems

Temperature sensors

Resistance

Positron emission tomography

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