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The moire interference phenomenon caused by the circular diffraction gratings under
coherent illumination is studied to utilize it for precise alignment. The phenomenon
is investigated by the Fresnel Kirchhoff's diffraction theory. The characteristics of
the moixe signals in the diffracted beams are examined as a function of the lateral
displacement and the airgap between the gratings. The moire signal obtained in the first
order diffracted beam has been employed to the precise short-range alignment. The
alignment system consists of a phase shifted pair of circular gratings and a stage driven
by piezo-electric atuators. The system is controlled by the micro-computer to keep
the alignment position. The alignment has been carried out with the precision of few
tens of nm.
Kazuhiro Hane,Toshio Goto, andShuzo Hattori
"Moire signals of circular gratings and its application to precise alignment", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34719
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Kazuhiro Hane, Toshio Goto, Shuzo Hattori, "Moire signals of circular gratings and its application to precise alignment," Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34719