Comparison of ultra-short pulses laser damage performance of UV AR coatings deposited by e-beam evaporation and magnetron sputtering

Jan Vanda; Martin Mydlar; Priyadarshani Narayanasamy; Mihai-George Muresan; Hana Turcicova; Radek Poboril; Jan Brajer; Tomas Mocek; Jiri Vohanka; Jan Dvorak

doi:10.1117/12.3033269

17 December 2024 Comparison of ultra-short pulses laser damage performance of UV AR coatings deposited by e-beam evaporation and magnetron sputtering

Jan Vanda, Martin Mydlar, Priyadarshani Narayanasamy, Mihai-George Muresan, Hana Turcicova, Radek Poboril, Jan Brajer, Tomas Mocek, Jiri Vohanka, Jan Dvorak

Author Affiliations +

Proceedings Volume 13190, Laser-Induced Damage in Optical Materials 2024; 1319004 (2024) https://doi.org/10.1117/12.3033269
Event: SPIE Laser Damage, 2024, San Ramon, CA, United States

Abstract

Thin-film layer systems coated by various techniques on the optical component surface are the most common method to finishing laser optics. Anti-reflective thin-film coatings are essential in laser optics to limit unwanted retro-reflections and decrease the reflection-induced losses occurring on boundaries of optical materials and air. Several different technologies are available to prepare laser-quality coatings, when the most common are magnetron sputtering and electron-beam ion-assisted deposition. However, coating materials and deposition parameters may significantly affect both laser resistance and optical quality of the coatings, and the influence of mentioned factors is getting stronger with shorter wavelengths. In following will be disseminated laser damage threshold of anti-reflective coatings prepared by e-beam evaporation with ion assisted deposition and plasma activated reactive magnetron sputtering at wavelength 343 nm in ultra-short pulses regime.

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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

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Jan Vanda, Martin Mydlar, Priyadarshani Narayanasamy, Mihai-George Muresan, Hana Turcicova, Radek Poboril, Jan Brajer, Tomas Mocek, Jiri Vohanka, and Jan Dvorak "Comparison of ultra-short pulses laser damage performance of UV AR coatings deposited by e-beam evaporation and magnetron sputtering", Proc. SPIE 13190, Laser-Induced Damage in Optical Materials 2024, 1319004 (17 December 2024); https://doi.org/10.1117/12.3033269

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