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Static sputter processes for the mass production of 5.25" magneto-optical data storage
media have been developed. Such single disk processes require a discontinuous operation
of circular magnetron cathodes in nonreactive and reactive gas atmospheres.
Magnetron field configurations based on specially shaped rotating magnet patterns allow
to meet high uniformity criteria for optical and magnetic properties of the individual
layers using 210 mm targets and an integrated inner/outer diameter disk masking.
The processes have been integrated into avery compact 'circular path coater'
which realizes a throughput of 180 disks/hour. Experimental results of the process
development for SiN and TbEeCo thin films are presented.
Guenter Braeuer,Wilfried Dicken, andSabine Mueller
"Production of magneto-optical data storage media by static DC sputter processes", Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); https://doi.org/10.1117/12.22382
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Guenter Braeuer, Wilfried Dicken, Sabine Mueller, "Production of magneto-optical data storage media by static DC sputter processes," Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); https://doi.org/10.1117/12.22382